History of ZEISS Semiconductor Metrology Systems

The Semiconductor Metrology Systems division is a leader in the field of metrology and repair solutions for photomasks. The success story began in 1994 when the company delivered its first Aerial Image Measurement System (AIMS™) for the semiconductor industry, the MSM-100. It is used to assess the functionality of photomasks.

In collaboration with NaWoTec (now part of ZEISS). The company launched an innovative procedure for repairing defective photomasks. Based on electron-beam technology, the MeRiT system is able to perform extremely precise repairs to eliminate critical photomask defects. The purchase of an Israeli start-up company expanded the portfolio with femtosecond laser technology. This laid the foundation for the development of various new products with which to optimize individual photomask parameters.

One of the more recent innovative solutions is the PROVE system, which enables customers to measure the position accuracy of structures on photomasks. Today these systems are standard in the semiconductor industry.