Visual Inspection
Implemented for GlobalFoundries
Predictive maintenance for automated guided vehicles
Unnecessary production downtimes caused by mechanical faults in automation technology can be avoided through visual inspection of automated transport systems. In semiconductor manufacturing, optical sensors ensure even more precise defect analysis of rail vehicles in the clean room.
ZEISS Digital Innovation tasks
GlobalFoundries Fab 1 in Dresden is the largest semiconductor factory in Europe. Overhead Transportation Vehicles (OHV) transport the wafers in the clean room via the Automated Material Handling System located in production. As part of the Digital Product Factory, the Smart Systems Hub worked with various hardware and software partners to develop a solution that uses acoustic sensor technology and a newly created cloud infrastructure to detect anomalies in the chassis of these vehicles, thereby minimizing downtime and optimizing maintenance cycles.
To avoid possible failures of the transport systems, the project is being further enhanced by a team from ZEISS Digital Innovation. The team is developing software integrated into the cloud environment for this purpose, which uses cameras to identify further deviations and faults on the vehicles. With the help of this visual inspection, which analyzes camera images in real time on an industrial edge PC, important information such as the degree of wear and position deviations of the guide wheels or contamination can be detected.
This information is used to calculate an individual “health score” for each vehicle and a dashboard is used to automatically derive recommended actions for timely maintenance. All analysis data will be transferred to the existing Data Collection Kit in order to extend the machine learning algorithm accordingly..
Benefits for the customer
Defective OHVs can damage the rail system in the factory, causing unnecessary as well as expensive repairs. The implementation of the sensor-to-cloud infrastructure as a predictive maintenance solution safeguards factory availability. Thanks to visual inspection, possible anomalies on the chassis of the transport vehicles can be reliably and automatically detected, such as lost circlips, bent wheel axles or defective bearings.
Based on both the acoustic and visual sensor data, the OHVs can be serviced in good time. In addition, during predictive maintenance, the system continues to run as normal, without this affecting it.
Many are working on Industry 4.0 solutions, but there is still great potential in Maintenance 4.0. To implement true predictive and condition-based maintenance strategies, there is often a lack of human perception. If we digitalize the senses, we can be one step ahead. This means that these capabilities, in combination with AI components, can be available on a non-stop and flexible basis to monitor our system on a condition-based basis. The technologies we are developing with ZEISS Digital Innovation will have a future-oriented impact on the high requirements for fail-safety in fully automated semiconductor manufacturing.
Challenges
Because of the high transport volume and the complex automation technology, regular inspection of the individual vehicles is very costly and resource-intensive. After the monitoring system had already been improved using position and acoustic sensor technology, this was due to be extended to include visual inspection. In the process, the system is to be seamlessly integrated into the existing hardware and software infrastructure.
A particular challenge is to detect even the smallest defects during normal operation. The limited space between rails and ceiling, the high vehicle speed and short transport cycles, as well as the special requirements for systems in the cleanroom have to be taken into account. As defects in production are a rare occurrence, very little data is available for machine learning algorithms.
Solution
In addition to the software component, the selection of suitable hardware components is also crucial. A conventional model-based computer vision approach combines geometric, photometric and statistical information. Image processing and fault detection run on an industrial edge PC connected to AWS cloud services. Communication with the cloud platform tracks the vehicles and enables connection to additional sensor data. That’s how an overall health value can be calculated for each vehicle.