Webinar
New Protocols for the Fabrication of Atom Probe Specimens
with LaserFIBs
1 October 2021
· 17 min watch
![]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/authors/perez-willard.jpg/_jcr_content/renditions/original.image_file.100.100.file/perez-willard.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/authors/perez-willard.jpg/_jcr_content/renditions/original.image_file.360.360.file/perez-willard.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/authors/perez-willard.jpg/_jcr_content/renditions/original./perez-willard.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/authors/perez-willard.jpg/_jcr_content/renditions/original./perez-willard.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/authors/perez-willard.jpg/_jcr_content/renditions/original./perez-willard.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/authors/perez-willard.jpg/_jcr_content/renditions/original./perez-willard.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/authors/perez-willard.jpg/_jcr_content/renditions/original./perez-willard.jpg"})
Author
Dr. Fabián Pérez Willard
Materials Science Sector Solutions Manager Nanoscience & Nanomaterials
ZEISS Microscopy
ZEISS Microscopy
Abstract
New Protocols for the Fabrication of Atom Probe Specimens with LaserFIBs
LaserFIB offer new possibilities for Atom Probe Tomography (APT) sample preparation. They combine rapid machining in the macroscopic scale with most precise FIB machining.
Two workflows are presented for:
1. the preparation of deeply buried ROIs, and
2. the so-called “moat” preparation with extremely high throughput
Key Learnings:
- The laser allows to prepare APT samples from deeply buried ROIs.
- The laser speeds up the "moat" preparation isolating the ROI rapidly from the bulk.
![]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/thumbnails/screensaver-new-protocols-for-the-fabrication.jpg/_jcr_content/renditions/original.image_file.100.56.0,1,1925,1084.file/screensaver-new-protocols-for-the-fabrication.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/thumbnails/screensaver-new-protocols-for-the-fabrication.jpg/_jcr_content/renditions/original.image_file.360.203.0,1,1925,1084.file/screensaver-new-protocols-for-the-fabrication.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/thumbnails/screensaver-new-protocols-for-the-fabrication.jpg/_jcr_content/renditions/original.image_file.768.432.0,1,1925,1084.file/screensaver-new-protocols-for-the-fabrication.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/thumbnails/screensaver-new-protocols-for-the-fabrication.jpg/_jcr_content/renditions/original.image_file.1024.576.0,1,1925,1084.file/screensaver-new-protocols-for-the-fabrication.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/thumbnails/screensaver-new-protocols-for-the-fabrication.jpg/_jcr_content/renditions/original.image_file.1280.720.0,1,1925,1084.file/screensaver-new-protocols-for-the-fabrication.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/thumbnails/screensaver-new-protocols-for-the-fabrication.jpg/_jcr_content/renditions/original.image_file.1440.810.0,1,1925,1084.file/screensaver-new-protocols-for-the-fabrication.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/thumbnails/screensaver-new-protocols-for-the-fabrication.jpg/_jcr_content/renditions/original.image_file.1920.1080.0,1,1925,1084.file/screensaver-new-protocols-for-the-fabrication.jpg"})
![Graphene imaged with scanning electron microscopy]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/graphene-research-and-the-evolution-of-2d-nano-materials-a-revolutionary-advancement-in-science/graphene1.jpg/_jcr_content/renditions/original.image_file.100.56.0,96,1024,672.file/graphene1.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/graphene-research-and-the-evolution-of-2d-nano-materials-a-revolutionary-advancement-in-science/graphene1.jpg/_jcr_content/renditions/original.image_file.360.203.0,96,1024,672.file/graphene1.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/graphene-research-and-the-evolution-of-2d-nano-materials-a-revolutionary-advancement-in-science/graphene1.jpg/_jcr_content/renditions/original.image_file.768.432.0,96,1024,672.file/graphene1.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/graphene-research-and-the-evolution-of-2d-nano-materials-a-revolutionary-advancement-in-science/graphene1.jpg/_jcr_content/renditions/original.image_file.1024.576.0,96,1024,672.file/graphene1.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/graphene-research-and-the-evolution-of-2d-nano-materials-a-revolutionary-advancement-in-science/graphene1.jpg/_jcr_content/renditions/original.image_file.1024.576.0,96,1024,672.file/graphene1.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/graphene-research-and-the-evolution-of-2d-nano-materials-a-revolutionary-advancement-in-science/graphene1.jpg/_jcr_content/renditions/original.image_file.1024.576.0,96,1024,672.file/graphene1.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/graphene-research-and-the-evolution-of-2d-nano-materials-a-revolutionary-advancement-in-science/graphene1.jpg/_jcr_content/renditions/original.image_file.1024.576.0,96,1024,672.file/graphene1.jpg"} "Graphene imaged with scanning electron microscopy")
![Finalists of the ZEISS Microscopy Young Researcher Award | Germany]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/towards-the-future-of-battery-research-with-ai/young-researcher-award-2023-clean.png/_jcr_content/renditions/original.image_file.100.56.file/young-researcher-award-2023-clean.png","small":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/towards-the-future-of-battery-research-with-ai/young-researcher-award-2023-clean.png/_jcr_content/renditions/original.image_file.360.203.file/young-researcher-award-2023-clean.png","medium":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/towards-the-future-of-battery-research-with-ai/young-researcher-award-2023-clean.png/_jcr_content/renditions/original.image_file.768.432.file/young-researcher-award-2023-clean.png","large":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/towards-the-future-of-battery-research-with-ai/young-researcher-award-2023-clean.png/_jcr_content/renditions/original.image_file.1024.576.file/young-researcher-award-2023-clean.png","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/towards-the-future-of-battery-research-with-ai/young-researcher-award-2023-clean.png/_jcr_content/renditions/original./young-researcher-award-2023-clean.png","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/towards-the-future-of-battery-research-with-ai/young-researcher-award-2023-clean.png/_jcr_content/renditions/original./young-researcher-award-2023-clean.png","max":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/towards-the-future-of-battery-research-with-ai/young-researcher-award-2023-clean.png/_jcr_content/renditions/original./young-researcher-award-2023-clean.png"} "Finalists of the ZEISS Microscopy Young Researcher Award | Germany")
![NiMH Cylindrical Cell under the X-ray Microscope]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/enhancing-battery-reliability-efficiency-and-safety/nimh-cylindrical-cell2_1280px.png/_jcr_content/renditions/original.image_file.100.56.0,67,1280,787.file/nimh-cylindrical-cell2_1280px.png","small":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/enhancing-battery-reliability-efficiency-and-safety/nimh-cylindrical-cell2_1280px.png/_jcr_content/renditions/original.image_file.360.203.0,67,1280,787.file/nimh-cylindrical-cell2_1280px.png","medium":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/enhancing-battery-reliability-efficiency-and-safety/nimh-cylindrical-cell2_1280px.png/_jcr_content/renditions/original.image_file.768.432.0,67,1280,787.file/nimh-cylindrical-cell2_1280px.png","large":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/enhancing-battery-reliability-efficiency-and-safety/nimh-cylindrical-cell2_1280px.png/_jcr_content/renditions/original.image_file.1024.576.0,67,1280,787.file/nimh-cylindrical-cell2_1280px.png","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/enhancing-battery-reliability-efficiency-and-safety/nimh-cylindrical-cell2_1280px.png/_jcr_content/renditions/original.image_file.1280.720.0,67,1280,787.file/nimh-cylindrical-cell2_1280px.png","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/enhancing-battery-reliability-efficiency-and-safety/nimh-cylindrical-cell2_1280px.png/_jcr_content/renditions/original.image_file.1280.720.0,67,1280,787.file/nimh-cylindrical-cell2_1280px.png","max":"https://www.zeiss.com/content/dam/rms/reference-master/resource-center/insights-hub/user-story/enhancing-battery-reliability-efficiency-and-safety/nimh-cylindrical-cell2_1280px.png/_jcr_content/renditions/original.image_file.1280.720.0,67,1280,787.file/nimh-cylindrical-cell2_1280px.png"} "NiMH Cylindrical Cell under the X-ray Microscope")
![ZEISS Crossbeam - FIB-SEM for High Throughput 3D Analysis and Sample Preparation]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam/crossbeam-550-system.jpg/_jcr_content/renditions/original.image_file.100.100.file/crossbeam-550-system.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam/crossbeam-550-system.jpg/_jcr_content/renditions/original.image_file.360.360.file/crossbeam-550-system.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam/crossbeam-550-system.jpg/_jcr_content/renditions/original.image_file.768.768.file/crossbeam-550-system.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam/crossbeam-550-system.jpg/_jcr_content/renditions/original.image_file.1024.1024.file/crossbeam-550-system.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam/crossbeam-550-system.jpg/_jcr_content/renditions/original.image_file.1280.1280.file/crossbeam-550-system.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam/crossbeam-550-system.jpg/_jcr_content/renditions/original.image_file.1440.1440.file/crossbeam-550-system.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam/crossbeam-550-system.jpg/_jcr_content/renditions/original./crossbeam-550-system.jpg"} "ZEISS Crossbeam")
![ZEISS Crossbeam 550 Samplefab]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-550-samplefab_w-monitor_right-side.png/_jcr_content/renditions/original.image_file.100.100.file/crossbeam-550-samplefab_w-monitor_right-side.png","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-550-samplefab_w-monitor_right-side.png/_jcr_content/renditions/original.image_file.360.360.file/crossbeam-550-samplefab_w-monitor_right-side.png","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-550-samplefab_w-monitor_right-side.png/_jcr_content/renditions/original.image_file.768.768.file/crossbeam-550-samplefab_w-monitor_right-side.png","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-550-samplefab_w-monitor_right-side.png/_jcr_content/renditions/original.image_file.1024.1024.file/crossbeam-550-samplefab_w-monitor_right-side.png","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-550-samplefab_w-monitor_right-side.png/_jcr_content/renditions/original.image_file.1280.1280.file/crossbeam-550-samplefab_w-monitor_right-side.png","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-550-samplefab_w-monitor_right-side.png/_jcr_content/renditions/original.image_file.1440.1440.file/crossbeam-550-samplefab_w-monitor_right-side.png","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/fib-sem/crossbeam-samplefab/crossbeam-550-samplefab_w-monitor_right-side.png/_jcr_content/renditions/original.image_file.1920.1920.file/crossbeam-550-samplefab_w-monitor_right-side.png"} "ZEISS Crossbeam 550 Samplefab")