C-SEM Upgrades

The Cascade Current Detector (C2D) replaces the VPSE G3 and VPSE G4 to enable very low kV imaging in variable pressure (VP) mode. Images at 1 - 3 kV are now far more effectively captured.

Benefits:

• Variable visualization
• Enhanced water vapor resolution
• Higher pressure range
  

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The ZEISS YAG (Yttrium Aluminum Garnet) single crystal scintillator BSD detector enables a higher efficiency of light conductance, which is ideal for low signal imaging. The material which is free of radiation damage turns the YAG BSD into a detector, suitable for all beam energy ranges.

Benefits:

• Higher signal output
• Damage prevention
• Improved versatility

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The new ETSE Detector (Everhart Thornely Secondary Electron) with optically coupled photomultiplier is designed to improve the SE collection at lower kV operations and longer working distances.

Benefits:

• Charging effect reduction
• Enhanced topographical imaging
• Superb surface detail

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This upgrade enables high sample throughput and thereby extends the information limit of your EVO system. The significantly lower electron beam energies used in the SEM result in reduced excited volume and increased cross sections at lower accelerating voltages.

Benefits:

• Advanced sample holder option
• Improved resolution & contrast
• Bright field imaging
  

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The ZEISS Workstation upgrade improves the daily process by using the latest SmartSEM software, high performance hardware specification and latest operating system.

Benefits:

• Latest SmartSEM version
• Intuitive navigation
• Windows 10

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Your interactive guide for software news, upgrades and additional functionality. Learn more about ZEISS software, workstations and compatibility, new software functionalities and recent software releases.

• Interactive tool to learn more about SmartSEM
• Easy software upgrade guide
• Workstation compatibility information
• Learn more about available additional software functionality
• SmartSEM Touch introduction
• Get information about hotfixes

Your scanning electron microscope measures and analyzes all kinds of samples in 2D: to analyze the surfaces of samples in 3D, use 3DSM, the optional software package from ZEISS. Get topographical information by reconstructing a complete 3D model of your sample’s surface using the signals of the aBSD or the AsB detector.

Benefits:

• 3DSM
• Perform a 3D surface reconstruction of your sample
• Profit from real-time operation and reconstruction times < 2s

3DSM Metrology:

• Gain automatic measurements and documentation in compliance with ISO 25178, DIN and ASME and other standards
• Create completely traceable metrological reports
• Characterize surfaces and profiles including parameters such as step height, distance, nanometer scaled contour, roughness and waviness, particle and grain size

Select an area of interest with a simple swipe of your finger and the EVO-System will automatically collect your data, running unattended whilst you perform other tasks. The upgrade enables you a comfortable workflow through its contemporary touch interface and a variety of automated tools..

Benefits:

• Sample type select
• Detector overlays
• Annotate & measure
  

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Case Study

By using ZEISS ECO Quiet Mode and with help from a vacuum reservoir the pre-pump is automatically switched off after reaching a factory pre-set vacuum level. The vacuum reservoir allows the system to be operated for hours without the need of the pre-pump. This results in both the reduction of noise levels and energy consumption.

Benefits:

• More comfortable application
• High definition imaging
• Energy-saving

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An Uninterruptable Power Supply (UPS) will be used if there is no steady supply of electrical power possible. It is designed to bridge short power failures and to shut down the microscope in a controlled manner during longer power failures.

Benefits:

• Bridge brief power failures
• Safety for your microscope

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