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C-SEM Upgrades

Service & Support

C-SEM Upgrades

For an Increased Life Time and Extended Functionality

Vacuum & Ease of Use

Software & Workstation

Detectors & Analytics

Nanostructuring & Patterning

Accessories

Detectors & Analytics

Analyze your sample through a wide range of different detectors. Different detectors allow you to receive various types of information about the surface, composition and other details which will help you to improve and ease your processes.

Find the most suitable detectors for your needs:

Get a recommendation which detector suits your application
Easy application guide
Detector specific information
Learn more about available functionality
Interactive tool to learn more about ZEISS detectors

Note: Press ESC to exit full-screen mode

Go to Detector Finder

C2D

Outstanding VP Imaging with Improved Pressure Range

The Cascade Current Detector (C2D) replaces the VPSE G3 and VPSE G4 to enable very low kV imaging in variable pressure (VP) mode. Images at 1 - 3 kV are now far more effectively captured.

Benefits:

Variable visualization
Enhanced water vapor resolution
Higher pressure range

C2DX

Excellent Imaging Variable- & Extended Pressure Mode

The Extended Range Cascade Current Detector (C2DX) is a detector unique to the EVO Series and is designed to provide superb imaging performance at the highest pressure up to 3000 Pa.

Benefits

Minimized sample preparation
Improved signal to noise imaging
Increased pressure range

YAG BSD

Great Topographical & Compositional Imaging in All Vacuum Modes

The ZEISS YAG (Yttrium Aluminum Garnet) single crystal scintillator BSD detector enables a higher efficiency of light conductance, which is ideal for low signal imaging. The material which is free of radiation damage turns the YAG BSD into a detector, suitable for all beam energy ranges.

Benefits:

Higher signal output
Damage prevention
Improved versatility

ES Amplifier for BSD Detectors

Experience Next Level Imaging and Greatly Enhanced Image Quality

The BSD-Detector is used to detect backscattered electrons, that have been scattered under very low angles. The new amplifier provides higher detector efficiencies and delivers a variety of contrast information, much higher gain and a lower noise level.

Benefits:

Enhanced signal collection
Quiet application
Variable imaging

ETSE for EVO & Sigma

Convincing Topographical SE Imaging

The new ETSE Detector (Everhart Thornely Secondary Electron) with optically coupled photomultiplier is designed to improve the SE collection at lower kV operations and longer working distances.

Benefits:

Charging effect reduction
Enhanced topographical imaging
Superb surface detail

VPSE G4

Improved Signal Collection for Faster Scan Speeds

The fourth generation Variable Pressure SE detector (VPSE G4) convinces with its improved collection signal and thereby a faster response time. Higher scan speeds enable you an increasement of productivity. VPSE G4 provides 20% more contrast up to 400 Pa pressure (at 20 keV).

Benefits:

Topographical imaging
Increased scan speeds
Enhanced low kV imaging

EVO STEM

Affordable Easy to Use STEM on Your C-SEM

This upgrade enables high sample throughput and thereby extends the information limit of your EVO system. The significantly lower electron beam energies used in the SEM result in reduced excited volume and increased cross sections at lower accelerating voltages.

Benefits:

Advanced sample holder option
Improved resolution & contrast
Bright field imaging

ZEISS SmartEDX

Embedded EDS Solution for Routine SEM Microanalysis Applications

If SEM imaging alone isn’t enough to gain a complete understanding of parts or samples, investigators will turn to Energy Dispersive Spectroscopy (EDS) to acquire spatially resolved elemental chemistry information.

Benefits:

Optimized for routine microanalysis applications
Workflow-guided graphical user interface
Total ZEISS service and system support

Nanostructuring & Patterning

Create structures in nanometer range by either removing or applying surface material and using different systems (e.g. Atomic Force Microscope), or benefit from multi-modal images and comprehensive multiscale with the various options of ZEISS Atlas 5.

Atlas 5

Master Your Multi-scale Challenge

ZEISS Atlas 5 makes your life easier: create comprehensive multiscale, multi-modal images with a sample-centric correlative environment.

Benefits:

Correlate images in multiple dimensions from multiple sources
Fast and easy image acquisition

Software & Workstation

Explore our latest software versions and extended functionality through license options as well as the current recommended high performance PC-Hardware to optimize your systems performance.

SEM Workstation

Efficient Workflows, Intuitive Navigation and Faster File Search

The ZEISS Workstation upgrade improves the daily process by using the latest SmartSEM software, high performance hardware specification and latest operating system.

Benefits:

Latest SmartSEM version
Intuitive navigation
Windows 10

SmartSEM

Operate Your Scanning Electron Microscope More Efficiently

SmartSEM is an operating system for electron microscopes that provides access to advanced microscope settings, designed to solve even the most challenging tasks.

Benefits:

Enhanced imaging conditions
Additional software modules
More information of your images
Intuitive navigation

Software Finder

Your Guide to SmartSEM Upgrades

Your interactive guide for software news, upgrades and additional functionality. Learn more about ZEISS software, workstations and compatibility, new software functionalities and recent software releases.

Interactive tool to learn more about SmartSEM
Easy software upgrade guide
Workstation compatibility information
Learn more about available additional software functionality
SmartSEM Touch introduction
Get information about hotfixes

Go directly to Software Finder

SmartPI

Simplify Your Operation and Analyze Each Particle Automatically

Smart Particle Investigator (SmartPI), your advanced particle analysis and classification solution turns scanning electron microscopes (SEM) into turnkey solutions for industrial cleanliness or metal and steel applications.

Benefits:

Simple & quick analysis
Intelligent particle detection
Live progress tracking

Software Module Catalog

Extend the Functionality and Performance of Your Microscope

Add new and improve existing functionality through our broad range of licenses which will help you to improve your processes, ease the use of your system and have tools to receive more information.

Benefits:

Improve your process by new functionality
More comfortable usage

3D Surface Modelling

Topographical 3D Sample Analysis

Your scanning electron microscope measures and analyzes all kinds of samples in 2D: to analyze the surfaces of samples in 3D, use 3DSM, the optional software package from ZEISS. Get topographical information by reconstructing a complete 3D model of your sample’s surface using the signals of the aBSD or the AsB detector.

Benefits:

3DSM
Perform a 3D surface reconstruction of your sample
Profit from real-time operation and reconstruction times < 2s

3DSM Metrology:

Gain automatic measurements and documentation in compliance with ISO 25178, DIN and ASME and other standards
Create completely traceable metrological reports
Characterize surfaces and profiles including parameters such as step height, distance, nanometer scaled contour, roughness and waviness, particle and grain size

Learn More About 3DSM

Shuttle & Find

Bridge the Micro and Nano World

With Shuttle & Find you connect your electron microscope and light microscope from ZEISS. The combined hardware and software solution enables you to transfer your specimen from one microscope system to another within just minutes.

Benefits:

Receive more information
Fast calibration
Flexible choice of components

SmartSEM Touch

Explore Your Object of Interest with a Simple Swipe of Your Finger

Select an area of interest with a simple swipe of your finger and the EVO-System will automatically collect your data, running unattended whilst you perform other tasks. The upgrade enables you a comfortable workflow through its contemporary touch interface and a variety of automated tools..

Benefits:

Sample type select
Detector overlays
Annotate & measure

Vacuum & Ease of Use

Increase your convenience and facilitate your work routine e.g. reduced loading time and increased sample throughput through the Airlock or a significantly reduced noise level through the ECO Quiet Mode. Decontaminate your specimen and chamber with the Plasma Cleaner or improve image quality through the compensation of charging effect with the Flood Gun or the Charge Compensation.

ZEISS ECO Quiet Mode

Reduce Noise and Save Energy

By using ZEISS ECO Quiet Mode and with help from a vacuum reservoir the pre-pump is automatically switched off after reaching a factory pre-set vacuum level. The vacuum reservoir allows the system to be operated for hours without the need of the pre-pump. This results in both the reduction of noise levels and energy consumption.

Benefits:

More comfortable application
High definition imaging
Energy-saving

Plasma Cleaner

Clean Your Chamber Quickly and Effectively

ZEISS offers you a fast and cost-efficient solution for specimen and chamber decontamination. A Plasma Cleaner is used to generate reactive gas-phase radicals in a plasma. The radicals migrate into the instrument chamber and chemically react with the unwanted hydrocarbons.

Benefits

Improved image quality
Fast specimen decontamination
Safe decontamination

Other Accessories

Upgrade your microscope with additional accessories such as sample holders, the latest version of our dual joystick controller and control panel or an Uninterruptible Power Supply (UPS) which ensures the safety of your system in case of a power failure.

Uninterruptible Power Supply

Secure Your Microscope in Case of a Power Failure and Prevent Data Loss

An Uninterruptable Power Supply (UPS) will be used if there is no steady supply of electrical power possible. It is designed to bridge short power failures and to shut down the microscope in a controlled manner during longer power failures.

Benefits:

Bridge brief power failures
Safety for your microscope

SEM Dual Joystick and Control Panel

Control Your SEM More Easily

With the Dual Joystick Controller and the Control Panel installed, operating becomes much more comfortable. The Dual Joystick Controller can be used for stage control and specimen navigation and the Control Panel gives you easy access to the most frequently used functions of the SEM.

Benefits:

Many compensation possibilities
Various configuration options
Convenient handling

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