![ZEISS Sigma ZEISS Sigma]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-stage.png/_jcr_content/renditions/original.image_file.100.100.420,0,1500,1080.file/sigma360-stage.png","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-stage.png/_jcr_content/renditions/original.image_file.360.360.420,0,1500,1080.file/sigma360-stage.png","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-stage.png/_jcr_content/renditions/original.image_file.768.768.420,0,1500,1080.file/sigma360-stage.png","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-stage.png/_jcr_content/renditions/original.image_file.1024.1024.420,0,1500,1080.file/sigma360-stage.png","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-stage.png/_jcr_content/renditions/original.image_file.1080.1080.420,0,1500,1080.file/sigma360-stage.png","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-stage.png/_jcr_content/renditions/original.image_file.1080.1080.420,0,1500,1080.file/sigma360-stage.png","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-stage.png/_jcr_content/renditions/original.image_file.1080.1080.420,0,1500,1080.file/sigma360-stage.png"})
ZEISS Sigma 高画質イメージングと高度な解析を実現する電界放出型SEM
ZEISS Sigmaファミリーは、電界放出型走査電子顕微鏡(FE-SEM)のテクノロジーと優れたユーザーエクスペリエンスを兼ね備えています。イメージングと解析ルーチンを構造化することで生産性が向上し、新しい材料、品質検査用の粒子試料、生物・地質試料などの観察に活用できます。妥協のない高分解能イメージングにより、1 kV以下の低加速電圧でも高い解像度とコントラストを達成します。さらに、クラス最高のEDSジオメトリを使用して高度な顕微鏡解析を実行し、より正確な解析データを2倍の速さで取得することができます。
Sigmaファミリーは、ユーザーを高度なナノ解析の世界へと導きます。
![ポリマーの界面における亀裂の形成と接着について調べるため、ポリスチレン試料を破壊。Sigma 360、C2D、3 kV、NanoVP liteモード、チャンバー内圧60 Pa。 NanoVP liteモードでイメージングしたポリスチレン。]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-benefit1.png/_jcr_content/renditions/original.image_file.100.50.file/sigma360-benefit1.png","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-benefit1.png/_jcr_content/renditions/original.image_file.360.180.file/sigma360-benefit1.png","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-benefit1.png/_jcr_content/renditions/original.image_file.768.384.file/sigma360-benefit1.png","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-benefit1.png/_jcr_content/renditions/original.image_file.1024.512.file/sigma360-benefit1.png","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-benefit1.png/_jcr_content/renditions/original.image_file.1280.640.file/sigma360-benefit1.png","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-benefit1.png/_jcr_content/renditions/original.image_file.1440.720.file/sigma360-benefit1.png","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-benefit1.png/_jcr_content/renditions/original./sigma360-benefit1.png"})
Sigma 360
コア施設から選ばれる直感的なイメージング
- セットアップからAIによる結果取得まで、専用のガイドに従って操作するだけの直感的なイメージングワークフローをご体験ください。
- 1 kV以下でも優れた解像度と最適なコントラストを実現
- VPイメージングにより、非導電体の非常に困難な条件でも優れた結果を取得可能
キャプション:NanoVP liteモードでイメージングしたポリスチレン。
![500 Vでの高分解能:焼結酸化アルミニウム(Al2O3)ナノスケール球体の段丘の測定サイズは3 nm。Sigma 560、Inlens SE検出器、500 Vで取得。 500 Vでの高分解能:焼結酸化アルミニウム(Al2O3)ナノスケール球体の段丘の測定サイズは3 nm。Sigma 560、Inlens SE検出器、500 Vで取得。]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-benefit2.png/_jcr_content/renditions/original.image_file.100.50.file/sigma360-benefit2.png","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-benefit2.png/_jcr_content/renditions/original.image_file.360.180.file/sigma360-benefit2.png","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-benefit2.png/_jcr_content/renditions/original.image_file.768.384.file/sigma360-benefit2.png","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-benefit2.png/_jcr_content/renditions/original.image_file.1024.512.file/sigma360-benefit2.png","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-benefit2.png/_jcr_content/renditions/original.image_file.1280.640.file/sigma360-benefit2.png","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-benefit2.png/_jcr_content/renditions/original.image_file.1440.720.file/sigma360-benefit2.png","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma360-benefit2.png/_jcr_content/renditions/original./sigma360-benefit2.png"})
Sigma 560
ハイスループット解析とin situ実験の自動化
- リアルワールドの試料を効率的に解析。スピードと汎用性を兼ね備えたSEMベースの解析が可能です。
- In situ実験の自動化:無人検査のための完全統合型ラボを実現します。
- 1 kV以下のイメージングが困難な試料にも対応。包括的な試料情報を収集できます。
テクノロジー
![Gemini光学カラムの断面図。 ビームブースター、Inlens検出器、Gemini対物レンズを搭載したGemini光学カラムの断面図。]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma_objective_lens.jpg/_jcr_content/renditions/original.image_file.100.100.file/sigma_objective_lens.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma_objective_lens.jpg/_jcr_content/renditions/original.image_file.360.360.file/sigma_objective_lens.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma_objective_lens.jpg/_jcr_content/renditions/original.image_file.768.768.file/sigma_objective_lens.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma_objective_lens.jpg/_jcr_content/renditions/original.image_file.1024.1024.file/sigma_objective_lens.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma_objective_lens.jpg/_jcr_content/renditions/original.image_file.1280.1280.file/sigma_objective_lens.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma_objective_lens.jpg/_jcr_content/renditions/original.image_file.1440.1440.file/sigma_objective_lens.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma_objective_lens.jpg/_jcr_content/renditions/original./sigma_objective_lens.jpg"})
![]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma_objective_lens.jpg/_jcr_content/renditions/original.image_file.100.100.file/sigma_objective_lens.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma_objective_lens.jpg/_jcr_content/renditions/original.image_file.360.360.file/sigma_objective_lens.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma_objective_lens.jpg/_jcr_content/renditions/original.image_file.768.768.file/sigma_objective_lens.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma_objective_lens.jpg/_jcr_content/renditions/original.image_file.1024.1024.file/sigma_objective_lens.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma_objective_lens.jpg/_jcr_content/renditions/original.image_file.1280.1280.file/sigma_objective_lens.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma_objective_lens.jpg/_jcr_content/renditions/original.image_file.1440.1440.file/sigma_objective_lens.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/sigma_objective_lens.jpg/_jcr_content/renditions/original./sigma_objective_lens.jpg"})
ビームブースター、Inlens検出器、Gemini対物レンズを搭載したGemini光学カラムの断面図。
Gemini 1光学系
Gemini 1の光学系は、対物レンズ、ビームブースター、Inlens検出コンセプトの3つの要素で構成されています。対物レンズの設計には静電場と磁場が組み合わせられており、磁場が試料に与える影響を最小限に抑えながら、光学性能を最大限に高めます。これにより、磁性材料のように困難な試料であっても優れたイメージングが可能となります。Inlensは、二次電子(SE)や後方散乱電子(BSE)を検出することにより、イメージング時間を最大限短縮しつつ、効率的なシグナル検出を実現することをコンセプトにしています。ビームブースターテクノロジーが小さなプローブサイズと高いSN比を保証します。
![Gemini 1の光学カラムと検出器の断面図。 検出器搭載SigmaのGemini 1のカラム。1 Inlens検出器(SEまたはDuo)。2 ETSE検出器、3 VPSE、4 C2D、5 aSTEM、6/7 EDS検出力が高く、様々な後方散乱を感知する検出器(aBSD1など)。]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/gemini_optical_column_with_detectors.jpg/_jcr_content/renditions/original.image_file.100.100.file/gemini_optical_column_with_detectors.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/gemini_optical_column_with_detectors.jpg/_jcr_content/renditions/original.image_file.360.360.file/gemini_optical_column_with_detectors.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/gemini_optical_column_with_detectors.jpg/_jcr_content/renditions/original.image_file.768.768.file/gemini_optical_column_with_detectors.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/gemini_optical_column_with_detectors.jpg/_jcr_content/renditions/original.image_file.1024.1024.file/gemini_optical_column_with_detectors.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/gemini_optical_column_with_detectors.jpg/_jcr_content/renditions/original.image_file.1280.1280.file/gemini_optical_column_with_detectors.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/gemini_optical_column_with_detectors.jpg/_jcr_content/renditions/original.image_file.1440.1440.file/gemini_optical_column_with_detectors.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/gemini_optical_column_with_detectors.jpg/_jcr_content/renditions/original./gemini_optical_column_with_detectors.jpg"})
Gemini 1の光学カラムと検出器の断面図。
![Gemini 1の光学カラムと検出器の断面図 検出器搭載SigmaのGemini 1のカラム。1 Inlens検出器(SEまたはDuo)。2 ETSE検出器、3 VPSE、4 C2D、5 aSTEM、6/7 EDS検出力が高く、様々な後方散乱を感知する検出器(aBSD1など)。]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/gemini_optical_column_with_detectors.jpg/_jcr_content/renditions/original.image_file.100.100.file/gemini_optical_column_with_detectors.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/gemini_optical_column_with_detectors.jpg/_jcr_content/renditions/original.image_file.360.360.file/gemini_optical_column_with_detectors.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/gemini_optical_column_with_detectors.jpg/_jcr_content/renditions/original.image_file.768.768.file/gemini_optical_column_with_detectors.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/gemini_optical_column_with_detectors.jpg/_jcr_content/renditions/original.image_file.1024.1024.file/gemini_optical_column_with_detectors.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/gemini_optical_column_with_detectors.jpg/_jcr_content/renditions/original.image_file.1280.1280.file/gemini_optical_column_with_detectors.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/gemini_optical_column_with_detectors.jpg/_jcr_content/renditions/original.image_file.1440.1440.file/gemini_optical_column_with_detectors.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/gemini_optical_column_with_detectors.jpg/_jcr_content/renditions/original./gemini_optical_column_with_detectors.jpg"})
検出器搭載SigmaのGemini 1のカラム。1 Inlens検出器(SEまたはDuo)。2 ETSE検出器、3 VPSE、4 C2D、5 aSTEM、6/7 EDS検出力が高く、様々な後方散乱を感知する検出器(aBSD1など)。
柔軟な検出機能
様々な検出器を搭載したSigmaでは、最新の検出テクノロジーにより、あらゆる試料の特性評価が可能です。ETSEと高真空モード用のInlens検出器が、高分解能のトポグラフィー取得をサポートします。低真空モードでVPSEやC2D検出器を使用することで、鮮明な画像を取得できます。aSTEM検出器では高分解能の透過画像を生成できます。様々なオプションが揃ったBSE検出器(aBSD検出器など)で組成やトポグラフィーを観察できます。
NanoVP liteモード
- NanoVP liteモードでは、スカート効果が低減され、ビームガスの光路長(BGPL)が短くなります。スカートを抑えることで、SEおよびBSEイメージングにおけるSN比が向上します。
- 5つの環状セグメントを持つ格納式のaBSDは、優れた材料コントラストを実現します。ビームスリーブを搭載しており、NanoVP liteモードでの操作時はポールピースの下に設置されます。ハイスループットと低加速電圧での組成・トポグラフィーコントラストイメージングを実現し、VPやHV(高真空)に適しています。
アクセサリ
![ZEISS FE-SEM用In Situラボ ZEISS FE-SEM用In Situラボで材料性能を微細構造に関連付ける]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/geminisem/geminisem460-monitore-insitu.jpg/_jcr_content/renditions/original.image_file.100.100.240,0,1680,1440.file/geminisem460-monitore-insitu.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/geminisem/geminisem460-monitore-insitu.jpg/_jcr_content/renditions/original.image_file.360.360.240,0,1680,1440.file/geminisem460-monitore-insitu.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/geminisem/geminisem460-monitore-insitu.jpg/_jcr_content/renditions/original.image_file.768.768.240,0,1680,1440.file/geminisem460-monitore-insitu.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/geminisem/geminisem460-monitore-insitu.jpg/_jcr_content/renditions/original.image_file.1024.1024.240,0,1680,1440.file/geminisem460-monitore-insitu.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/geminisem/geminisem460-monitore-insitu.jpg/_jcr_content/renditions/original.image_file.1280.1280.240,0,1680,1440.file/geminisem460-monitore-insitu.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/geminisem/geminisem460-monitore-insitu.jpg/_jcr_content/renditions/original.image_file.1440.1440.240,0,1680,1440.file/geminisem460-monitore-insitu.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/geminisem/geminisem460-monitore-insitu.jpg/_jcr_content/renditions/original.image_file.1440.1440.240,0,1680,1440.file/geminisem460-monitore-insitu.jpg"})
ZEISS FE-SEM用In Situラボ
材料性能を微細構造に関連付ける
ZEISS FE-SEMに、加熱・引張実験用のin situソリューションを追加できます。統合ソリューションのメリットをご活用ください。金属、合金、ポリマー、プラスチック、複合材料、セラミックスなどの材料を観察可能です。さらに、機械的引張または圧縮ステージ、加熱ユニット、専用高温検出器を解析と組み合わせることができます。統一されたソフトウェア環境が無人自動材料試験を可能にし、1台のパソコンからすべてのシステムを制御できます。
![SmartEDX SmartEDX - 組み込み式エネルギー分散型X線分光法]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/accessories/smart-edx_system.jpg/_jcr_content/renditions/original.image_file.100.100.240,0,1680,1440.file/smart-edx_system.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/accessories/smart-edx_system.jpg/_jcr_content/renditions/original.image_file.360.360.240,0,1680,1440.file/smart-edx_system.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/accessories/smart-edx_system.jpg/_jcr_content/renditions/original.image_file.768.768.240,0,1680,1440.file/smart-edx_system.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/accessories/smart-edx_system.jpg/_jcr_content/renditions/original.image_file.1024.1024.240,0,1680,1440.file/smart-edx_system.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/accessories/smart-edx_system.jpg/_jcr_content/renditions/original.image_file.1280.1280.240,0,1680,1440.file/smart-edx_system.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/accessories/smart-edx_system.jpg/_jcr_content/renditions/original.image_file.1440.1440.240,0,1680,1440.file/smart-edx_system.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/accessories/smart-edx_system.jpg/_jcr_content/renditions/original.image_file.1440.1440.240,0,1680,1440.file/smart-edx_system.jpg"})
SmartEDX
組み込み式エネルギー分散型X線分光法
![完全統合型RISE 完全統合型RISE - ラマンイメージングと査型電子顕微鏡のメリットを活用]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/accessories/sigma-300-rise-system.jpg/_jcr_content/renditions/original.image_file.100.100.240,0,1680,1440.file/sigma-300-rise-system.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/accessories/sigma-300-rise-system.jpg/_jcr_content/renditions/original.image_file.360.360.240,0,1680,1440.file/sigma-300-rise-system.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/accessories/sigma-300-rise-system.jpg/_jcr_content/renditions/original.image_file.768.768.240,0,1680,1440.file/sigma-300-rise-system.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/accessories/sigma-300-rise-system.jpg/_jcr_content/renditions/original.image_file.1024.1024.240,0,1680,1440.file/sigma-300-rise-system.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/accessories/sigma-300-rise-system.jpg/_jcr_content/renditions/original.image_file.1280.1280.240,0,1680,1440.file/sigma-300-rise-system.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/accessories/sigma-300-rise-system.jpg/_jcr_content/renditions/original.image_file.1440.1440.240,0,1680,1440.file/sigma-300-rise-system.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/sigma/accessories/sigma-300-rise-system.jpg/_jcr_content/renditions/original.image_file.1440.1440.240,0,1680,1440.file/sigma-300-rise-system.jpg"})
完全統合型RISE
ラマンイメージングと査型電子顕微鏡のメリットを活用
ラマン分光イメージング(RISE)を追加すれば、材料の特性評価を補完できます。Sigma 360を共焦点ラマンイメージング機能で拡張することで、試料の化学的フィンガープリントの取得が可能になります。分子・結晶の情報を認識することができます。また、ラマンマッピングとEDSデータを使用して、3D解析およびSEMイメージングとの相関が可能です。完全統合型RISEにより、クラス最高のSEMおよびラマンシステムの両方を活用できます。