ソフトウェア
ZEISS SmartSEM
SEM、FE-SEM、FIB-SEM用ソフトウェアソリューション
ZEISS SmartSEMは、ZEISS電子顕微鏡用の操作システムです。顕微鏡の高度な設定を可能にするとともに、困難な課題も解決します。あらゆる操作パラメータを完全に制御するためにご使用ください。GUIの操作モードは、ユーザーのレベルに応じて、フルコントロール、または時々使うユーザーのために開発された簡潔なGUIの2種類から選べます。追加のモジュールにより、いつでも簡単に機能を拡張できます。
モジュール
![SmartPI Explorerのナビゲーションウィンドウに表示されたマルチパーティクルビュー]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/smartpi_explorer.png/_jcr_content/renditions/original.image_file.100.63.32,0,1888,1160.file/smartpi_explorer.png","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/smartpi_explorer.png/_jcr_content/renditions/original.image_file.360.225.32,0,1888,1160.file/smartpi_explorer.png","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/smartpi_explorer.png/_jcr_content/renditions/original.image_file.768.480.32,0,1888,1160.file/smartpi_explorer.png","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/smartpi_explorer.png/_jcr_content/renditions/original.image_file.1024.640.32,0,1888,1160.file/smartpi_explorer.png","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/smartpi_explorer.png/_jcr_content/renditions/original.image_file.1280.800.32,0,1888,1160.file/smartpi_explorer.png","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/smartpi_explorer.png/_jcr_content/renditions/original.image_file.1440.900.32,0,1888,1160.file/smartpi_explorer.png","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/smartpi_explorer.png/_jcr_content/renditions/original.image_file.1856.1160.32,0,1888,1160.file/smartpi_explorer.png"} "SmartPI Explorerのナビゲーションウィンドウに表示されたマルチパーティクルビュー")
![SmartPI Explorerのナビゲーションウィンドウに表示されたマルチパーティクルビュー]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/smartpi_explorer.png/_jcr_content/renditions/original.image_file.100.60.file/smartpi_explorer.png","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/smartpi_explorer.png/_jcr_content/renditions/original.image_file.360.218.file/smartpi_explorer.png","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/smartpi_explorer.png/_jcr_content/renditions/original.image_file.768.464.file/smartpi_explorer.png","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/smartpi_explorer.png/_jcr_content/renditions/original.image_file.1024.619.file/smartpi_explorer.png","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/smartpi_explorer.png/_jcr_content/renditions/original.image_file.1280.773.file/smartpi_explorer.png","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/smartpi_explorer.png/_jcr_content/renditions/original.image_file.1440.870.file/smartpi_explorer.png","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/smartpi_explorer.png/_jcr_content/renditions/original./smartpi_explorer.png"} "SmartPI Explorerのナビゲーションウィンドウに表示されたマルチパーティクルビュー")
SmartPI Explorerのナビゲーションウィンドウに表示されたマルチパーティクルビュー。
SmartPI
- SmartPI モジュールの使用で、粒度、形状、形態、元素組成を半自動的に定量化、分類、測定
- 製造、コンフィギュレーション、レポートの用途に合わせて、異なるモード間の切り替えが容易
- 製造モード：SmartPIが自動で操作条件を設定し、選択した分析ルーチンに従って測定を開始
- コンフィギュレーションモード：SEM設定から粒子の分類、レポートまで、関連する項目を簡単に設定
- レポートモード：シングルフレームで異常調査も有する対話式解析をレポートやプロセスデータを作成、実行
![SmartBrowse]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/sem_smart-browse_evo.tif/_jcr_content/renditions/original.image_file.100.63.0,120,908,688.file/sem_smart-browse_evo.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/sem_smart-browse_evo.tif/_jcr_content/renditions/original.image_file.360.225.0,120,908,688.file/sem_smart-browse_evo.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/sem_smart-browse_evo.tif/_jcr_content/renditions/original.image_file.768.480.0,120,908,688.file/sem_smart-browse_evo.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/sem_smart-browse_evo.tif/_jcr_content/renditions/original.image_file.908.568.0,120,908,688.file/sem_smart-browse_evo.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/sem_smart-browse_evo.tif/_jcr_content/renditions/original.image_file.908.568.0,120,908,688.file/sem_smart-browse_evo.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/sem_smart-browse_evo.tif/_jcr_content/renditions/original.image_file.908.568.0,120,908,688.file/sem_smart-browse_evo.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/software/zeiss-smartsem/sem_smart-browse_evo.tif/_jcr_content/renditions/original.image_file.908.568.0,120,908,688.file/sem_smart-browse_evo.jpg"} "SmartBrowse")
SmartBrowse
- 異なる倍率で多くの検出器から獲得した画像を組み合わせて、試料と照らし合わせて大きな画像を構築
- ステージ座標を参照し、画像を簡単にナビゲート
- 異なるフィルタ処理と表示モードにより、隠れた情報を解除
- 3次元画像を回転させながら、さまざまな角度から画像を映し出して試料を詳細に観察
- システムパラメータを使用して、画像のプロパティにアクセス
![SmartSEM Touch]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/evo/evo-web-smartsem-touch-user-interface.jpg/_jcr_content/renditions/original.image_file.100.63.0,180,960,780.file/evo-web-smartsem-touch-user-interface.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/evo/evo-web-smartsem-touch-user-interface.jpg/_jcr_content/renditions/original.image_file.360.225.0,180,960,780.file/evo-web-smartsem-touch-user-interface.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/evo/evo-web-smartsem-touch-user-interface.jpg/_jcr_content/renditions/original.image_file.768.480.0,180,960,780.file/evo-web-smartsem-touch-user-interface.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/evo/evo-web-smartsem-touch-user-interface.jpg/_jcr_content/renditions/original.image_file.960.600.0,180,960,780.file/evo-web-smartsem-touch-user-interface.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/evo/evo-web-smartsem-touch-user-interface.jpg/_jcr_content/renditions/original.image_file.960.600.0,180,960,780.file/evo-web-smartsem-touch-user-interface.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/evo/evo-web-smartsem-touch-user-interface.jpg/_jcr_content/renditions/original.image_file.960.600.0,180,960,780.file/evo-web-smartsem-touch-user-interface.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/evo/evo-web-smartsem-touch-user-interface.jpg/_jcr_content/renditions/original.image_file.960.600.0,180,960,780.file/evo-web-smartsem-touch-user-interface.jpg"} "SmartSEM Touch")
![SmartSEM Touch]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/evo/evo-web-smartsem-touch-user-interface.jpg/_jcr_content/renditions/original.image_file.100.100.file/evo-web-smartsem-touch-user-interface.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/evo/evo-web-smartsem-touch-user-interface.jpg/_jcr_content/renditions/original.image_file.360.360.file/evo-web-smartsem-touch-user-interface.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/evo/evo-web-smartsem-touch-user-interface.jpg/_jcr_content/renditions/original.image_file.768.768.file/evo-web-smartsem-touch-user-interface.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/evo/evo-web-smartsem-touch-user-interface.jpg/_jcr_content/renditions/original./evo-web-smartsem-touch-user-interface.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/evo/evo-web-smartsem-touch-user-interface.jpg/_jcr_content/renditions/original./evo-web-smartsem-touch-user-interface.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/evo/evo-web-smartsem-touch-user-interface.jpg/_jcr_content/renditions/original./evo-web-smartsem-touch-user-interface.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/sem/evo/evo-web-smartsem-touch-user-interface.jpg/_jcr_content/renditions/original./evo-web-smartsem-touch-user-interface.jpg"} "SmartSEM Touch")
SmartSEM Touch
- 直感的な操作のメリット：SmartSEM Touchは、タッチスクリーンで操作し、インタラクティブなワークフローを指先で直接制御可能
- 素早く簡単に習得でき、トレーニングの労力と費用を劇的に削減。初心者ユーザーでも、数分で美しい画像をキャプチャできるように
- 繰り返しの検査作業のための自動化されたワークフローを必要とする産業オペレーターをサポートするユーザーインターフェース
- ラボの管理者は、繰り返しのイメージングルーチン作業のパラメータを事前に設定できるため、初心者とルーチンユーザーが常に全く同じパラメータを使用して繰り返しデータを取得することが可能
- 多言語対応で、ローカリゼーションと使用が容易
![ZEISS SmartPIのプレビュー画像]({"max":"https://asset-downloads.zeiss.com/catalogs/preview/mic/18954efb-5467-40e5-ac97-ab67235f3d3f/EN_product-flyer_SmartPI.pdf.jpg"} "ZEISS SmartPIをダウンロード")
![ZEISS SmartSEMのプレビュー画像]({"max":"https://asset-downloads.zeiss.com/catalogs/preview/mic/654ede53-1372-4035-b283-fef01abaa731/EN_aftersales-flyer_SmartSEM_A4.rel.1.0.pdf.jpg"} "ZEISS SmartSEMをダウンロード")
![ZEISS SmartSEM Touchのプレビュー画像]({"max":"https://asset-downloads.zeiss.com/catalogs/preview/mic/7640a935-d4d6-4286-a777-951cb8e1fa25/EN_aftersales-flyer_SmartSEM-touch_rel.3.0.pdf.jpg"} "ZEISS SmartSEM Touchをダウンロード")
![Using ZEISS SmartSEM Touchのプレビュー画像]({"max":"https://asset-downloads.zeiss.com/catalogs/preview/mic/d2307323-4e2c-456b-a502-8a2febb35d15/EN_42_013_307_wp_SmartSEM_Touch_3column.pdf.jpg"} "Using ZEISS SmartSEM Touchをダウンロード")