Thin Films

But one of the major challenges in thin film research is imaging surfaces at high resolution without introducing specimen damage. Gaining accurate, high resolution chemical data from these same samples using EDS is also problematic, due to extremely low X-Ray counts.

Solving these problems has pushed the development of SEM tools that allow higher resolution imaging at lower and lower kV. In fact, high performance SEM imaging below 1 kV is now considered the gold standard when analyzing thin film materials. And if you combine this with high resolution EDS mapping using advanced detector systems (that maximize the solid and take-off angles), you can also glean highly accurate chemical data from these surfaces too. In turn, this gives you confidence that your EDS spectrum or map is an accurate representation of your sample.

ZEISS continues to develop low-kV, high resolution imaging technology so you can push your research forward. ZEISS GeminiSEMs, combined with EDS detectors specifically designed for the Gemini optical SEM columns, help you analyze the surface of beam-sensitive thin films with never-before-seen resolution. Additionally, fast and non-destructive 3D-topographic measurements can be performed optically - with confocal laser scanning techniques.