Workshop

Effective and Repeatable End-Pointing During TEM Lamella Prep

A ZMCC SkillBuilder Workshop

9:00am - 12:00pm PST

Workshop Details

Workshop Overview & Agenda

Producing high-quality lamella for TEM or STEM-in-SEM imaging requires thinning to a specific thickness, with minimal damage and, at times, at specific target areas. The Crossbeam FIB-SEM platform provides unique capabilities for any user to create such high-quality lamellae. In this workshop, the workflow of thinning lamellae will be covered: the use of live imaging while milling at any e-beam and I-beam conditions to monitor lamella thickness, the use of live imaging while milling to monitor polishing orientation and location, and other tips and tricks for lamella thinning/end-pointing.

This virtual workshop consisting of one three-hour session, streamed live from the ZEISS Microscopy Customer Center (ZMCC) in Dublin, CA. Through screen-sharing from the instrument and multiple cameras, the complete operation of the instrument will be visible as our SEM Application experts cover a full itinerary of training topics as detailed below.

It is recommended that attendees secure time on their instruments after the workshop sessions to apply the shared methods on their own samples. Attendees are strongly encouraged to share their images from individual sessions and interact with our Applications team through independent email threads for further optimization.

Who should attend?

  • Existing users of ZEISS Crossbeams interested in thinning lamellae generally or to target specific features
  • Existing users of Crossbeam looking to improve their current skill level to better support and/or train other users

Learning objectives after completion of this workshop, attendees should:

  • Benefit from reproducible lamella thinning by leveraging built-in and optional features on the Crossbeam
  • Have the confidence to always produce results on precious samples containing important, unique features by using tips and tricks covered in the targeted lamella preparation and thinning
  • Learn the best practices for using the range of high and low-kV FIB probes to minimize amorphous damage on lamella

This is a paid workshop.​
Spots are limited.​

Access to a FIB-SEM after each day is strongly recommended to apply lessons learned and share results with applications team for further support.
 

Tuesday, June 17th, 9:00am - 12:00pm PST

  • Hardware and software capabilities that enable users to effectively and repeatably end-point/thin lamellae
  • Thinning lamellae at different acceleration voltages
  • Live imaging while milling at different e-beam and I-beam conditions and with any detector to monitor lamella window’s thickness, orientation, and location
  • Tips and tricks for end-pointing at specific regions by using fiducials and live imaging while milling
  • Macros and automation that coexist with these features

After the workshop sessions, the attendees are strongly encouraged to attempt the methods shown on their own systems with their own samples. Screen sharing sessions to review the data can be setup with the applications team through independent email threads. Our support team will assist in further optimization and answer any questions to help attendees acquire the best data possible.
 

Author Joe Favata, PhD EM Applications Engineer

Joe has been working within the Semiconductor/Electronics Applications space for 8 years. He has extensive experience in training users in FIB-SEM and FE-SEM as well as customizing and optimizing workflows for industrial labs in the Semi/Electronics space. He is determined and focused on ensuring all those in the Semi/Electronics space who utilize ZEISS solutions are achieving their objectives with efficiency and ease.

Register for the workshop

This is a paid training. The investment for this 1-day virtual workshop is $400. You will receive a link to complete payment by credit card after signing up. If you require a PO to purchase training please reach out to us after registering.

Once we have received payment, we will send you a confirmation e-mail; expect to receive the link to join the Teams Webinar 1 day prior to training.

To guarantee your spot, please make sure to submit your payment at least 2 days prior.

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