Product

ZEISS Axio Imager Vario

Upright Microscope for Large Samples

Analyze smallest MEMS sensors or an entire flat panel with ZEISS Axio Imager Vario. Its column design allows you to investigate extremely large specimens simultaneously offering high stability. Moreover, Axio Imager Vario is certified for use in clean rooms.

Examine large samples
Clean room compatible
In focus at all times

Examine Large Samples

Select a manual or a motorized column, take advantage of being able to investigate specimens with a maximum size of 300 mm × 300 mm and a maximum height of 254 mm. Whether dealing with heavy samples or working in combination with the confocal laser scanning microscope ZEISS LSM for materials – the sturdy column design provides reliable stability and prevents vibrations.

Certified for Clean Room Work

Wafer and photomask inspections are subject to extremely strict requirements concerning cleanliness. Therefore, they are done in clean rooms. These are classified according to DIN EN ISO 14644-1, differentiating by number and size of particles per m³. Axio Imager Vario is certified according to this standard and meets the requirements of clean room class 5. Clean room class ISO 5 is equivalent to class 100 of the former standard FED STD 209E (1992).

In Focus at All Times

When examining reflective, low-contrast surfaces simply equip your Axio Imager Vario with the efficient Hardware Auto Focus. It guarantees high precision for both reflected and transmitted light. The sensor detects changes in the focus position and any deviations are compensated automatically. Even large specimens remain perfectly focused while being moved.

TFT Display, brightfield, transmitted light, red, green and blue subpixels

Hardware Auto Focus

Materials research and industrial production require a focus that ensures high precision levels of max. 0.3 times the objective’s depth of field. Benefit from a focusing system with a lock-in range of up to 12000 µm. Use the auto focus for your applications in reflected light and transmitted light, in brightfield, darkfield, polarization contrast, differential interference contrast and oblique illumination.

Applications

Discover Metalographic Applications of Axio Imager Vario for Materials.

Wood

Reflected light Darkfield, EC Epiplan-APOCHROMAT 10x/0,30

Wood. Reflected light Darkfield, EC Epiplan-APOCHROMAT 10x/0,30
Circuit Board

Reflected light Brightfield, EC Epiplan-NEOFLUAR 5x/0,13

Circuit Board. Reflected light Brightfield, EC Epiplan-NEOFLUAR 5x/0,13
Wafer

Reflected light, Darkfi eld EC Epiplan-APOCHROMAT 50x/0,95

Wafer. Reflected light, Darkfi eld EC Epiplan-APOCHROMAT 50x/0,95
Monocrystalline Silicon Solar Cell

Reflected light, C-DIC, EC Epiplan-APOCHROMAT 50x/0.95

Monocrystalline Silicon Solar Cell. Reflected light, C-DIC, EC Epiplan-APOCHROMAT 50x/0.95

Related Applications

Downloads

ZEISS Axio Imager Vario

Examine Large Specimens – Automated and Compatible with Clean Rooms

File size: 7 MB

Download

Microscope and Measurement Systems for Quality Assurance and Quality Control

Capture the essentials of your component. Quickly. Simply. Comprehensively.

File size: 4 MB

Download

ZEISS Solutions for Semiconductor Development, Manufacturing, and Analysis

Accelerating Digital Transformation and Innovation for Semiconductor Electronics

File size: 13 MB

Download
Quality Control of Large-Sized Prismatic Rechargeable Lithium-Ion Batteries Using Light Microscopy

ZEISS Axio Imager.Z2 Vario

File size: 1 MB

Download
ZEISS Axio Imager Vario

Examine grandes amostras – de modo automatizado e compatível com câmaras estéreis.

File size: 7 MB

Download

ZEISS Axio Imager Vario

큰 시편 검사 – 클린룸에 적합한 자동화된 장비

File size: 8 MB

Download