ZEISS MultiSEM: The World’s Fastest Scanning Electron Microscope

Product

ZEISS MultiSEM 505/506

The World’s Fastest Scanning Electron Microscopes

Unleash the acquisition speed of up to 91 parallel electron beams – to image samples in the centimeter scale at nanometer resolution. This unique scanning electron microscope is designed for continuous, reliable 24/7 operation. Simply set up your high-throughput data acquisition workflow and MultiSEM will acquire high-contrast images automatically.

Unprecedented imaging speed
Automated large-area image acquisition
Nanoscale details in the macroscopic context
High-contrast images at low noise levels

Mouse brain section, maximum acquisition speed of 1.22 gigapixels/second. Courtesy of J. Lichtman, Harvard University, Cambridge, MA, USA.

Revolutionize the Speed of Electron Microscopy

Multiple electron beams working in parallel give you unprecedented gross imaging speed. Acquiring an area of 1 mm² at 4 nm pixel size takes only a few minutes. The unrivaled acquisition speed of more than 1 TB per hour enables imaging of large volumes (> 1 mm³) at nanometer resolution. Optimized detectors collect the secondary electron signals very efficiently, providing you with high contrast images at low noise levels.

_{Caption: Mouse brain section, maximum acquisition speed of 1.22 gigapixels/second. Courtesy of J. Lichtman, Harvard University, Cambridge, MA, USA.}

Image Huge Samples at Nanometer Resolution

Don’t sacrifice sample size for nanometer resolution. MultiSEM is equipped with a sample holder covering an area of 10 cm × 10 cm and built for continuous 24/7 operation. You can finally image the entire sample and discover everything you need to answer your scientific questions. You get the detailed picture‚ without losing the macroscopic context.

Electron Microscopy with ZEN Imaging Software

By introducing ZEN to MultiSEM, we bring the standard software for ZEISS light microscopes to the world of electron microscopy. Control MultiSEM in a straightforward, intuitive way: Smart auto-tuning routines support you as you capture optimal images with high resolution and quality. You quickly set up even complex automated acquisition procedures, adapted and tuned to your sample imaging.

The ZEISS MultiSEM Family

	MultiSEM 505	MultiSEM 506
Number of beams	61	91
Scan arrangement	Image tile consists of 61 sub images arranged in a hexagonal pattern	Image tile consists of 91 sub images arranged in a hexagonal pattern
Field of view at 12 µm pitch size	108 μm	132 μm
Field of view at 15 µm pitch size (optional)	135 μm	165 μm

The Technology Behind ZEISS MultiSEM

Video animation visualizing the MultiSEM working principle

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Multiple Electron Beams and Detectors in Parallel

MultiSEM uses multiple electron beams (green: illumination path) and detectors in parallel. A finely tuned detection path (red) collects a large yield of secondary electrons (SE) for imaging. Each beam carries out a synchronized scanning routine at one sample position, resulting in a single sub image. The electron beams are arranged in a hexagonal pattern. The full image is formed by merging all image tiles. A parallel computer setup is used for fast data recording, ensuring high total imaging speed. Image acquisition and workflow control are fully separated in the MultiSEM system.

Integrated Workflow

Serial Section Tomography for Acquisition of Large Sample Volumes

Automated Sectioning

Section your resin-embedded biological tissue automatically with the ATUMtome. Collect up to 1000 serial sections in a single day.
Sample Mounting

Mount the section tape on a silicon wafer and image the sample with a light microscope. Transfer the wafer to your MultiSEM, use the overview for navigation and plan your experiment.
Experiment Setup

You set up your whole experiment with a single graphical control center. Save time with the efficient automated section detection to identify and target your regions of interest.

ZEISS MultiSEM at Work

Femoral neck sample, selectively etched to carve out osteocytes, hidden within the bone matrix before. Sample courtesy of M. Knothe Tate, University of New South Wales, Australia, and U. Knothe, Cleveland, OH, USA.
Mouse brain section, maximum acquisition speed of 1.22 gigapixels/second. Courtesy of J. Lichtman, Harvard University, Cambridge, MA, USA.
High maturity shale rock sample with broad ion beam milled surface. Sample: courtesy of L. Hathon, University of Houston, TX, USA.
Separator foil of a cycled battery with precipitates from the anode side. Image acquired at low landing energy of 1 keV and 4 nm pixel size, covering a field of view of 108 μm × 94 μm.
65 nm technology node graphics processor integrated circuit, stripped to its silicon substrate with HF acid etching.