![微流控示例:采用不同参数加工的20 nm宽纳米通道,长度可达20 μm。 微流控示例:采用不同参数加工的20 nm宽纳米通道,长度可达20 μm。]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/nvpe_micro-fluidics-channels_atlas-5.jpg/_jcr_content/renditions/original.image_file.100.100.0,0,1200,1200.file/nvpe_micro-fluidics-channels_atlas-5.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/nvpe_micro-fluidics-channels_atlas-5.jpg/_jcr_content/renditions/original.image_file.360.360.0,0,1200,1200.file/nvpe_micro-fluidics-channels_atlas-5.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/nvpe_micro-fluidics-channels_atlas-5.jpg/_jcr_content/renditions/original.image_file.768.768.0,0,1200,1200.file/nvpe_micro-fluidics-channels_atlas-5.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/nvpe_micro-fluidics-channels_atlas-5.jpg/_jcr_content/renditions/original.image_file.1024.1024.0,0,1200,1200.file/nvpe_micro-fluidics-channels_atlas-5.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/nvpe_micro-fluidics-channels_atlas-5.jpg/_jcr_content/renditions/original.image_file.1200.1200.0,0,1200,1200.file/nvpe_micro-fluidics-channels_atlas-5.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/nvpe_micro-fluidics-channels_atlas-5.jpg/_jcr_content/renditions/original.image_file.1200.1200.0,0,1200,1200.file/nvpe_micro-fluidics-channels_atlas-5.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/nvpe_micro-fluidics-channels_atlas-5.jpg/_jcr_content/renditions/original.image_file.1200.1200.0,0,1200,1200.file/nvpe_micro-fluidics-channels_atlas-5.jpg"})
用于纳米材料和纳米科学的显微镜应用
微流控和纳流控
未来纳流控器件的精准纳米图案化和无荷电效应无损成像
纳流控器件能够在研究基础科学过程和探索各种机制方面助您一臂之力,如纳米毛细管现象、受限结构中的质量传输以及DNA蛋白质相互作用。
用于这些研究的纳流控器件的优势在于其尺寸和形状灵活性。这些特性可以借助电子束和离子束进行精准设计,使科学家能够按需调整各种性质。但是,为了制造满足未来应用所需精度的纳流控器件,标准的FIB-SEM工具远远不够。
标准工具力不胜任
例如,SEM中绝缘样品的荷电效应是一个大问题,因为它会使图像失真。一种解决方案是将导电金属沉积在待研究样品的表面,但这会损坏样品,使其之后无法使用。另一方面,SEM中的电荷中和意味着您可以对纳流控样品进行无损成像,而无需在其上涂敷金属薄膜。
传统FIB-SEM设备已不足以应对当今的纳米材料研究。要进一步推动纳流控的发展,将出色的SEM成像性能与高FIB样品通量相结合的能力至关重要。而同样重要的是您能够根据自身需求增长以模块化方式升级FIB-SEM。借助该模块化的平台概念,您的显微镜得以满足您不断增长的研究需求。
为研究准备合适的工具
您研究工具必须能够满足您的研究需求,这是最基本的要求。为此,蔡司致力于帮助科学家推动纳流控研究的进展,让您可以在低电压下结合高FIB样品通量和大规模材料切割能力实现无损的高性能SEM成像。
应用实例
详图:塑形的通道。样品提供者:德国汉堡纳米结构和固态物理研究所的I. Fernández-Cuesta。观察视野100 µm
![在硅压印母模上用FIB加工出的纳流控通道 在硅压印母模上用FIB加工出的纳流控通道]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/se_meander-channels-crossbeam-550.jpg/_jcr_content/renditions/original.image_file.100.75.0,0,1025,769.file/se_meander-channels-crossbeam-550.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/se_meander-channels-crossbeam-550.jpg/_jcr_content/renditions/original.image_file.360.270.0,0,1025,769.file/se_meander-channels-crossbeam-550.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/se_meander-channels-crossbeam-550.jpg/_jcr_content/renditions/original.image_file.768.576.0,0,1025,769.file/se_meander-channels-crossbeam-550.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/se_meander-channels-crossbeam-550.jpg/_jcr_content/renditions/original.image_file.1024.768.0,0,1025,769.file/se_meander-channels-crossbeam-550.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/se_meander-channels-crossbeam-550.jpg/_jcr_content/renditions/original.image_file.1025.769.0,0,1025,769.file/se_meander-channels-crossbeam-550.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/se_meander-channels-crossbeam-550.jpg/_jcr_content/renditions/original.image_file.1025.769.0,0,1025,769.file/se_meander-channels-crossbeam-550.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/se_meander-channels-crossbeam-550.jpg/_jcr_content/renditions/original.image_file.1025.769.0,0,1025,769.file/se_meander-channels-crossbeam-550.jpg"})
使用蔡司Atlas 5的纳米图形化与可视化引擎模块制图,观察视野59 μm。
![长度可达20 μm的20 nm宽纳米通道,使用蔡司Atlas 5的纳米图形化与可视化引擎模块图形化,观察视野59 μm。 长度可达20 μm的20 nm宽纳米通道,使用蔡司Atlas 5的纳米图形化与可视化引擎模块图形化,观察视野59 μm。]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/nvpe_micro-fluidics-channels_atlas-5.jpg/_jcr_content/renditions/original.image_file.100.75.0,150,1200,1050.file/nvpe_micro-fluidics-channels_atlas-5.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/nvpe_micro-fluidics-channels_atlas-5.jpg/_jcr_content/renditions/original.image_file.360.270.0,150,1200,1050.file/nvpe_micro-fluidics-channels_atlas-5.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/nvpe_micro-fluidics-channels_atlas-5.jpg/_jcr_content/renditions/original.image_file.768.576.0,150,1200,1050.file/nvpe_micro-fluidics-channels_atlas-5.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/nvpe_micro-fluidics-channels_atlas-5.jpg/_jcr_content/renditions/original.image_file.1024.768.0,150,1200,1050.file/nvpe_micro-fluidics-channels_atlas-5.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/nvpe_micro-fluidics-channels_atlas-5.jpg/_jcr_content/renditions/original.image_file.1200.900.0,150,1200,1050.file/nvpe_micro-fluidics-channels_atlas-5.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/nvpe_micro-fluidics-channels_atlas-5.jpg/_jcr_content/renditions/original.image_file.1200.900.0,150,1200,1050.file/nvpe_micro-fluidics-channels_atlas-5.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/applications/materials/nanomaterials/nvpe_micro-fluidics-channels_atlas-5.jpg/_jcr_content/renditions/original.image_file.1200.900.0,150,1200,1050.file/nvpe_micro-fluidics-channels_atlas-5.jpg"})