扫描电子显微镜（SEM）使用聚焦电子束扫描样品，获得带有样品形貌和成分信息的图像。
蔡司CSEM（采用热电子源的传统SEM）和FE-SEM（带场发射电子源的场发射SEM）提供高分辨率成像和出色的材料衬度。
● 高分辨率表面敏感信息和材料衬度。 ● 广泛应用于纳米技术、材料研究、生命科学、半导体、原材料和工业领域。
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用于SEM、FE-SEM和FIB-SEM的软件解决方案
![扫描电子显微镜（SEM）]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/overview/sem-wallpaper.jpg/_jcr_content/renditions/original.image_file.100.33.file/sem-wallpaper.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/overview/sem-wallpaper.jpg/_jcr_content/renditions/original.image_file.360.120.file/sem-wallpaper.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/overview/sem-wallpaper.jpg/_jcr_content/renditions/original.image_file.768.256.file/sem-wallpaper.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/overview/sem-wallpaper.jpg/_jcr_content/renditions/original.image_file.1024.341.file/sem-wallpaper.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/overview/sem-wallpaper.jpg/_jcr_content/renditions/original.image_file.1280.427.file/sem-wallpaper.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/overview/sem-wallpaper.jpg/_jcr_content/renditions/original.image_file.1440.480.file/sem-wallpaper.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/products/electron-ion/overview/sem-wallpaper.jpg/_jcr_content/renditions/original./sem-wallpaper.jpg"} "扫描电子显微镜（SEM）")
![蔡司SmartSEM]({"xsmall":"https://www.zeiss.com/content/dam/rms/reference-master/service-support/upgrades/fib-sem/new-images/evo-smartsem-controller.jpg/_jcr_content/renditions/original.image_file.100.100.file/evo-smartsem-controller.jpg","small":"https://www.zeiss.com/content/dam/rms/reference-master/service-support/upgrades/fib-sem/new-images/evo-smartsem-controller.jpg/_jcr_content/renditions/original.image_file.360.360.file/evo-smartsem-controller.jpg","medium":"https://www.zeiss.com/content/dam/rms/reference-master/service-support/upgrades/fib-sem/new-images/evo-smartsem-controller.jpg/_jcr_content/renditions/original.image_file.768.768.file/evo-smartsem-controller.jpg","large":"https://www.zeiss.com/content/dam/rms/reference-master/service-support/upgrades/fib-sem/new-images/evo-smartsem-controller.jpg/_jcr_content/renditions/original./evo-smartsem-controller.jpg","xlarge":"https://www.zeiss.com/content/dam/rms/reference-master/service-support/upgrades/fib-sem/new-images/evo-smartsem-controller.jpg/_jcr_content/renditions/original./evo-smartsem-controller.jpg","xxlarge":"https://www.zeiss.com/content/dam/rms/reference-master/service-support/upgrades/fib-sem/new-images/evo-smartsem-controller.jpg/_jcr_content/renditions/original./evo-smartsem-controller.jpg","max":"https://www.zeiss.com/content/dam/rms/reference-master/service-support/upgrades/fib-sem/new-images/evo-smartsem-controller.jpg/_jcr_content/renditions/original./evo-smartsem-controller.jpg"} "蔡司SmartSEM")