Production work at ZEISS SMT
About us

ZEISS Semiconductor Manufacturing Technology With precision for the future

Without microchips,

the modern world stands still

Our everyday lives are becoming increasingly digital, smart, and connected – with computing power expanding all the time. This is only possible with microchips that are smaller, more powerful and more energy-efficient. Co-founder of Intel Gordon Moore stated in the eponymous law that the number of transistors on a computer chip doubles every two years.

This can only be achieved

with absolute precision

ZEISS Semiconductor Manufacturing Technology (SMT) creates the basis for Moore's Law to continue to be written. Through our diverse product portfolio, we cover a wide range of key processes in microchip manufacturing, including optical lithography, process control and mask optimization. This is how we empower chipmakers around the world.

Without foresight,

we wouldn't be here

For example, around 25 years of research and development have gone into innovative EUV lithography. We are already working on the next technological leap in semiconductor technology. At nine sites and with partners in Europe and worldwide. For even more precise processes. For even more powerful smartphones. For Industry 4.0 and autonomous driving. For the future.

ZEISS SMT in figures

  • 8,500

    Colleagues work on pioneering innovations for the semiconductor industry – and the SMT team continues to grow

  • 4.122

    Billion € revenue of ZEISS Semiconductor Manufacturing Technology in the fiscal year 2023/2024

  • 2020

    ZEISS, TRUMPF and the Fraunhofer Institute (IOF) receive the German Future Prize for EUV lithography

  • 1,200

    International partners in the development network

  • 2,000

    ZEISS holds patents in the field of EUV technology

  • SMT history

    Driving digitalization for over 50 years

    ZEISS looks back on over 175 years of experience. ZEISS SMT has been an enabler and driver of the semiconductor technology for over 50 years. The timeline shows the most important milestones of the semiconductor manufacturing technology.

  • first ZEISS SMT circuit printer from 1968
    1968
    1968

    First ZEISS optics for a circuit printer

    The lens depicted structures of 15 micrometers. The circuit printer from Telefunken was the precursor of the present-day wafer stepper and scanner.

  • first wafer stepper with ZEISS SMT optics
    1977
    1977

    first wafer stepper with ZEISS optics

    The S-Planar® 10/0.28 lens with 1 micrometer resolution is used in the first wafer stepper worldwide made by David Mann (later GCA).

      

  • EUV illumination system from ZEISS SMT
    1994
    1994

    Foundation of ZEISS SMT

    The Semiconductor Technology Business Group at ZEISS is founded.

  • Logo of ZEISS SMT partner ASML
    1997
    1997

    Strategic partnership with ASML

    Start of the strategic partnership between ZEISS and Dutch wafer stepper and scanner manufacturer ASM Lithography (now ASML).

  • First 193 nanometer optics from ZEISS SMT
    1998
    1998

    First 193 nanometer optics

    193 nanometer technology from ZEISS enables the next leap in performance and technology within the semiconductor industry.

  • Microchip structures facilitate new technologies
    2002
    2002

    Leading position

    ASML and ZEISS SMT become global market leaders in the production of semiconductor manufacturing technology.

  • ZEISS Semiconductor Mask Solutions building in Rossdorf
    2005
    2005

    Expanding the portfolio

    NaWoTec GmbH Rossdorf becomes part of ZEISS SMT. Thus, ZEISS also offers mask repair systems.

  • Building of Pixer Isreal as part of ZEISS SMT
    2008
    2008

    Expanding the portfolio

    Pixer Technology in Israel becomes part of ZEISS SMT, adding mask tuning solutions to the portfolio.

  • ZEISS SMT staff in the clean room
    2016
    2016

    Deepening the collaboration

    ASML becomes minority shareholder of ZEISS SMT.

  • Two employees of SMT Process Control Solutions chat in the ZEISS SMT clean room
    2017
    2017

    New business

    ZEISS Process Control Solutions is founded, supplementing the ZEISS SMT portfolio with process control solutions for semiconductor customers.

  • Anniversary celebration with management marking 50 years of ZEISS SMT - photographed in front of lithography optics
    2018
    2018

    Anniversary

    Celebrating 50 years of ZEISS SMT.

  • EUV technology from ZEISS SMT is deployed in the latest smartphones
    2019
    2019

    EUV in smartphones

    The first chips manufactured using EUV lithography arrive on the mass market in the new smartphone generations.

      

  • Frank-Walter Steinmeier presents the ZEISS SMT team with the German Future Prize 2020 for EUV technology
    2020
    2020

    Award

    EUV lithography is awarded the German Future Prize.

  • The logo of the 25 years of strategic partnership between ZEISS SMT and ASML
    2022
    2022

    Anniversary

    Strategic partnership of ASML and ZEISS SMT
      

  • Mirror of the High-NA-EUV technology as part of EUV lithography of ZEISS SMT - a view into the clean room
    2023
    2023

    High-NA-EUV lithography

    The first projection optics and illumination system was delivered.
     

  • Building of the new site Aachen from ZEISS
    2024
    2024

    Portfolio expansion

    ZEISS SMT takes over Philips Engineering Solutions in Aachen and thus has another location in Germany.

  • Building of ZEISS SMT in Coswig with Branding
    2024
    2024

    Expansion of production and development capacities

    The Lithography division of Beyond Gravity is part of the Semiconductor Manufacturing Technology segment of ZEISS.

Semiconductor Manufacturing Technology from ZEISS

Shaping technological progress

The corporate structure of ZEISS SMT with all Business Units
The corporate structure of ZEISS SMT with all Business Units
The corporate structure of ZEISS SMT with all Business Units

Through our product portfolio and world-leading know-how, we cover various key processes in the manufacture of microchips. Our products include semiconductor manufacturing optics – notably lithography optics – photomask systems as well as process control solutions for the semiconductor manufacturing industry. Thanks to technologies from ZEISS, microchips are becoming increasingly smaller, more powerful, more energy-efficient – and more cost-effective. The electronic equipment in which these products are installed fosters global progress in a variety of disciplines, including technology, electronics, communications, entertainment, mobility and energy. Semiconductor Manufacturing Technology is headquartered in Oberkochen. Additional sites of ZEISS SMT are located in Jena, Rossdorf, Wetzlar, Aachen and Coswig (Germany), Zurich (Switzerland), Bar Lev (Israel) as well as Dublin (USA).

 

The heart of digitalization beats here – at ZEISS SMT

If passion meets precision and we grow beyond the limits of what is possible: Then the heart of digitalization beats here. At ZEISS. At the SMT. In Oberkochen, Jena, Wetzlar, Rossdorf, Aachen, Coswig, Zurich, Dublin, and Bar Lev. How we today already enable the technologies of tomorrow? See for yourself and feel it, the heartbeat of digitalization!

ZEISS SMT sites worldwide

Our company, sales and service sites

World map with all the sites of ZEISS Semiconductor Manufacturing Technology
  • Headquarters in Oberkochen, Germany

    Carl Zeiss SMT GmbH
    Rudolf-Eber-Strasse 2
    73447 Oberkochen
    Germany

    Phone: +49 7364 20-0
    Fax: +49 7364 20-6808
    info.smt@zeiss.com


    More sites in Germany:

    • Carl Zeiss SMT GmbH
      Carl-Zeiss-Promenade 10
      07745 Jena
      Germany

      Phone: +49 3641 64-2563
      Fax: +49 3641 64-2938
      info.smt@zeiss.com
    • Carl Zeiss SMT GmbH
      Gloelstrasse 3-5
      35576 Wetzlar
      Germany

      Phone: +49 6441 404-0
      Fax: +49 6441 404-203
      info.smt@zeiss.com
    • Carl Zeiss SMT GmbH
      Industriestraße 1
      64380 Rossdorf
      Germany

      Phone: +49 6154 8038-0
      Fax: +49 6154 8038-80
      info.smt@zeiss.com
    • Carl Zeiss SMT GmbH
      Philipsstraße 8
      52068 Aachen
      Germany

      Phone: +49 241 91285-000
      info-aachen.smt.de@zeiss.com
    • Carl Zeiss SMT GmbH
      An der Walze 7
      01640 Coswig
      Germany

      Phone: +49 351 4970 1610
      info.smt@zeiss.com

    Site in Switzerland:

    Carl Zeiss SMT Switzerland AG
    Schaffhauserstraße 580
    8052 Zurich
    Switzerland

    Phone: +41 76 843 46 98
    info.smt@zeiss.com

  • Site in the U.S.:

    ZEISS Innovation Center California
    5300 Central Parkway
    Dublin, CA 94568

    Phone: +1-925-701-3600
    info.smt@zeiss.com

     

    Service sites in the U.S.:

    • Hillsboro Office
      1925 NE Stucki Ave, 4th Floor
      Hillsboro, OR 97006, USA
    • Boise Office
      9095 S Federal Way
      Boise, Idaho 83716, USA
    • Phoenix Office
      20430 N 19th Ave, Suite 160
      Phoenix, AZ 85027, USA
  • Site in Israel:

    Carl Zeiss SMS Ltd.
    HaDolev 3, P.O Box 32
    Bar Lev Industrial Park
    D.N. Misgav 2015600
    Israel

    Phone: +972 4 9088 602
    Fax: +972 4 9088 666
    info.smt@zeiss.com

     

     

    Sales and service sites in Taiwan:

    • Hsinchu Office
      Carl Zeiss Co., Ltd
      8F-6, No. 6, Gaotie E. 2nd Rd., Zhubei City, Hsinchu County, 302041, Taiwan (Region)
    • Taichung Office
      Carl Zeiss Co., Ltd
      9F., No. 573, Sec. 2, Taiwan Blvd., West Dist., Taichung City, 403020, Taiwan (Region)
    • Tainan Office
      Carl Zeiss Co., Ltd
      5F., No. 8, Daye 1st Rd., Xinshi Dist., Tainan City, 744092 Taiwan (Region)

     

    Sales and service sites in Korea:

    • Seoul Office
      Carl Zeiss Co., Ltd.
      13F, SONO Tower, 135, Beobwon-ro, Songpa-gu Seoul, 05836, Republic of Korea

    • Dongtan Office
      Carl Zeiss Co., Ltd.
      ZIP Code: 18469, Dongtangiheung-ro #211, 2F, The First Tower, 602 Gyeonggi-do HWASEONGSI, 18469, Republic of Korea

    • PyeongTaek Office
      Carl Zeiss Co., Ltd.
      ZIP Code: 17958, #801, 28, Godeokgalpyeong 5-gil, Pyeongtaek-si, Gyeonggi-do, Republic of Korea

     

    Sales and service sites in China: 

    • Shanghai Office
      Carl Zeiss Shanghai Co., Ltd.
      No.60 Meiyue Road, China (Shanghai) Pilot Free Trade Zone
    • Jinan Office
      Carl Zeiss Co., Ltd.
      Room 302, Building B12, South District, China-Europe Manufacturing International Enterprise Port, No. 3599, Hangtian Avenue, Zhangqiu District, Jinan City, Shandong Province

     

    Sales and service site in Japan:

    Carl Zeiss Co., Ltd.
    ZEISS Group
    2-10-9 Kojimachi, Chiyoda-ku, Tokyo, 102-0083, Japan

ZEISS SMT management

  • Portrait of Dr. Frank Rohmund as President & Chief Executive Officer of ZEISS Semiconductor Manufacturing Technology in Oberkochen, Germany

    Dr. Frank Rohmund

    ZEISS Executive Board Member | President & Chief Executive Officer

    The PhD physicist has been CEO of the ZEISS segment Semiconductor Manufacturing Technology (SMT) since January 2025. Prior to this, he led the ZEISS Semiconductor Manufacturing Optics (SMO) business unit. Through his role as Head of the Field of Business EUV and Head of Development for the business unit ZEISS Semiconductor Mask Solutions (SMS), he possesses an impressive wealth of experience. Frank Rohmund joined ZEISS SMT in 2001 as a research associate.

  • Portrait of Torsten Reitze as Chief Financial Officer of ZEISS SMT in Oberkochen, Germany

    Torsten Reitze

    Chief Financial Officer

    Since 2018, the business administration graduate has been a member of the Management Board as Commercial Director at the ZEISS segment Semiconductor Manufacturing Technology (SMT). Before this, he held the same role in the ZEISS Industrial Quality & Research (IQR) segment and in the business unit ZEISS Semiconductor Manufacturing Optics (SMO) within ZEISS SMT.

  • Portrait of Christoph Hensche as President ZEISS Semiconductor Manufacturing Optics  in Oberkochen

    Christoph Hensche

    President ZEISS Semiconductor Manufacturing Optics

    The engineer with an MBA has been leading the ZEISS Semiconductor Manufacturing Optics (SMO) business unit since 2025. Prior to this role, he served as Chief Operating Officer and Digital Transformation Officer for the ZEISS Semiconductor Manufacturing Technology (SMT) segment. Christoph Hensche began in 2005 as a project manager for various R&D projects at ZEISS SMT, took on the responsibility for the Sales department of lithography optics in 2010, and subsequently led the Field of Business DUV within the business unit ZEISS SMO, as well as in 2017 the business unit ZEISS Semiconductor Mask Solutions (SMS).

  • Portrait of Dr. Clemens Neuenhahn in his role as Head of ZEISS Semiconductor Mask Solutions in Jena

    Dr. Clemens Neuenhahn

    Head of ZEISS Semiconductor Mask Solutions

    Dr. Clemens Neuenhahn has been Head of the ZEISS Semiconductor Mask Solutions (SMS) business unit within the ZEISS segment Semiconductor Manufacturing Technology (SMT) since 2022. Prior to this, the PhD physicist was responsible for strategic business development at ZEISS SMT.

  • Portrait of Dr. Stefan Preuss as Head of ZEISS Process Control Solutions in the USA

    Dr. Stefan Preuss

    Head of ZEISS Process Control Solutions

    Dr. Stefan Preuss has been leading the ZEISS Process Control Solutions (PCS) business unit within the ZEISS Semiconductor Manufacturing Technology (SMT) segment since 2020. The PhD chemist joined ZEISS SMT in 2012 as Head of Strategic Business Development. Before that, he worked as a management consultant for ZEISS SMT and ZEISS Medical Technology.

  • Portrait of Wolfgang Seitz in his role as Chief Operating Officer & Digital Transformation Officer at ZEISS SMT in Oberkochen

    Dr. Wolfgang Seitz

    Chief Operating Officer & Digital Transformation Officer

    Dr. Wolfgang Seitz has been the Chief Operating Officer & Digital Transformation Officer of the ZEISS segment Semiconductor Manufacturing Technology (SMT) since January 2025. Previously, the doctoral engineer in electrical engineering led the Field of Business EUV of the business unit ZEISS Semiconductor Manufacturing Optics (SMO).

  • Portrait of Dr. Thomas Stammler as Chief Technology Officer of ZEISS SMT in Oberkochen, Germany

    Dr. Thomas Stammler

    Chief Technology Officer

    The PhD physicist has been Chief Technology Officer and Head of Product Strategy for the ZEISS Semiconductor Manufacturing Technology (SMT) segment since 2021. Dr. Thomas Stammler has been part of ZEISS SMT since 1998, gaining valuable experience in various roles, most recently as Head of Design & Technology.

  • Portrait of Dr. Jens Werner as Head of Human Resource at ZEISS SMT in Oberkochen, Germany

    Dr. Jens Werner

    Head of Human Resources

    Dr. Jens Werner has been Head of Human Resources at the ZEISS segment Semiconductor Manufacturing Technology (SMT) since 2017. The PhD lawyer joined ZEISS in 2004 and has since held several leadership roles within the human resources area.

Frequently Asked Questions

  • SMT stands for Semiconductor Manufacturing Technology, the semiconductor segment of the technology company ZEISS. We develop and manufacture equipment for the production of microchips, but we do not produce chips ourselves. Instead, we enable chip manufacturers all over the world to produce increasingly smaller, more powerful, and more energy-efficient chips thanks to the most precise optics, as well as systems for repairing photomasks and process control solutions. Thus, we enable our digitalized life.

  • The technologies and solutions developed by ZEISS SMT contribute to making microchips even smaller, more powerful, and more energy-efficient. When integrated into electronic products, they drive global progress - in the technology sector as well as in industries such as electronics, communications, entertainment, automotive, and energy.
    With our three business units, we offer a comprehensive product portfolio covering the core areas of semiconductor manufacturing optics, photomask systems, and process control solutions.
     

  • Whether in refrigerators, cars, or smartphones - ZEISS SMT technology is in all these devices. Approximately 80 percent of all microchips worldwide are manufactured using lithography optics from ZEISS SMT. For high-end chips, such as those used in artificial intelligence applications, ZEISS SMT holds a 100 percent market share. To achieve this, we continuously research and work on the next technological leap and have realized the next stage of development for even more powerful and efficient microchips of the future with the latest High-NA-EUV lithography. Achieving such high-tech advancements requires teamwork. That is why we work with a strong network of more than 1,200 partners. Our strategic partner ASML in the Netherlands plays a crucial role by integrating our ZEISS technologies into its solutions.

  • ZEISS SMT is one of four segments of the ZEISS Group, one of the world’s leading technology companies with a long history in the optical and optoelectronic industries. The ZEISS Group also includes the segments Industrial Quality & Research, Medical Technology, and Consumer Markets. The delivery of the first ZEISS lens for a circuit printer (predecessor or wafer steppers and scanners) in 1968 is considered the founding of ZEISS SMT. The headquarter of ZEISS SMT is located in Oberkochen, Germany. Other German sites include Jena, Wetzlar, Rossdorf, Aachen and Coswig. ZEISS SMT has a site in Zurich, Switzerland, branches in Dublin in the US as well as a representation in Bar Lev in Israel. In addition, our Sales and Service Companies (SSCs) are located in the US, South Korea, Japan, Taiwan, and China.

  • The ZEISS Semiconductor Manufacturing Technology segment consists of three strategic business units (SBUs), that cover key processes in the manufacturing of microchips: the Semiconductor Manufacturing Optics (SMO) unit develops and manufactures semiconductor manufacturing optics, including lithography optics for DUV, EUV, and High-NA-EUV technology, as well as optical modules and synchrotron optics. Semiconductor Mask Solutions (SMS) enable semiconductor customers to benefit from error-free, high-quality photomasks. The portfolio also includes solutions for the measurement, inspection, and repair of photomasks. The Process Control Solutions (PCS) unit enables precise process control and defect analysis for the faster and more efficient production of semiconductor components with products such as the 3D Metrology and Inspection Workstation and ZEISS MultiSEM.
    More information about ZEISS SMT and the entire ZEISS Group can be found in the current ZEISS Annual Report.
     

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